TCAD and Statistical Software Packages Available

The Silicon Technology Research Group has access to the following software packages. Details of their local implementation are available.

Avant! (TMA) Software Packages

• SUPREM-3 - A 1-D process simulator
• TSUPREM-4 - A 2-D process simulator
• MEDICI - A 2-D device simulator
• DAVINCI - A 3-D device simulator
• RAPHAEL - An interconnect simulator (Capacitance and resistance)
• Taurus-Lithography - A lithography simulator
• Taurus-Topography - A layer deposition and etch simulator
• AURORA - Parameter extraction Software
• DFM WorkBench - Virtual wafer fabrication software
• Taurus-Visual - Integrated Circuit Technology Visualisation
• STUDIO - GUI interface for Avant!(TMA) simulators

Domain Software Solutions Ltd Software Packages

• RS/1 - A statistical and data analysis and management software that includes a built-in programming language for complete customization
• RS/Explore An integrated statistical advisory package that provides menu-driven data exploration, analysis, and interpretation of results. It enables even even non-statisticians to slice through massive amounts of data to significant information.
• RS/Discover - Design of experiment (DOE) software to reduce the number of experimental runs required
• RS/QCA II - A Statistical Process Control (SPC) and quality data analysis package.
• Cornerstone - An exploratory data-analysis package built specifically to help analyze complex production processes in manufacturing applications. Additional analysis modules include multiple regression, principle components analysis and MANOVA.

Agilent Software Packages

• ICCAP - Parameter Extraction Software

STRG Software Packages

• DFM for the Manufacture of ICs - The CALPHURNIA software
• Practical Yield Optimisation - The EYE software
• 3-D Interconnect Simulation - The 3DTOP Software

Other Software Packages Available

• Norman/Debora - Simulation DOE and RSM package written by IMEC.

Links to vendors of TCAD software

• Avant! (Technology Modelling Associates)
• Silvaco International
• Integrated Systems Engineering
• BIPSIM Inc
• PDF Solutions
• Microcosm Technologies

Links to University TCAD software

• Stanford
• Berkeley
• IMEC
• MIT
• Florida
• TU Vienna
• Edinburgh

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Revision Date: 3 August 2000