Selected Papers and Reports

• The integration of simulation and response surface methodology for the optimization of IC processes Postscript (476,246)

• Using RSM Techniques to Contour Plot Response Distributions of Semiconductor Processes Postscript (34,899)

• A Total TCAD Strategy for DFM in IC Technology Development Postscript (7,081,641)

• A Comparison of Direct Monte-Carlo and DOE Simulations for Optimising IC Processes Postscript (86868)

• Integration of Costing, Yield and Performance Metrics into the TCAD Environment through the Combination of DOE and RSM Postscript (664052)

• HTML EYE :A Tool for Measuring the Defect Sensitivity of IC Layout Postscript (797393)

• A Defect Sensitivity Measurement Tool Enabling Comparison of Multilevel Interconnection Strategies Postscript (946520)

• HTML Efficient Critical Area Algorithms and their Application to Yield Improvement and Test Strategies Postscript (675732)

• The Automatic Generation of Conformal IC Data for Interconnect Capacitance Simulation. Postscript (10112705)

• Automating the calculation of IC Interconnect Paracitics Postscript (15994388)

• Parameter Sensitivity of Covariance Based Response Surfaces for Modelling IC Processes Postscript

• Application of Covariance Structures to Improve the Fit of Response Surfaces to Simulation Data PDF

• Application of Covariance based Models to Fit Response Surfaces to Experimental Data Postscript

• Microelectronic Test Structures PDF

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Revision Date: 1st Feb 1999