Institute for Integrated Micro and Nano Systems (Technology Research) (IMNS)

The Institute for Integrated Micro and Nano Systems has technology research projects in a number of areas that range from the fabrication of deep sub-micron MOS devices through to microsystem technology which includes projects aimed at improving the manufacturing efficiency of silicon fabrication plants. The Institute Technology staff have recently moved into the £4.2M Scottish Microelectronics Centre , a purpose built building with 300m2 of class 10 cleanrooms and associated laboratory space. The cleanroom is fully equipped with standard microelectronic microfabrication equipment including measurement equipment (MIAC) and state-of-the-art simulation software . The Institute for Integrated Micro and Nano Systems is a member of NESM and also has many close links with the IC fabrication industry.
The Department's web server can be searched but if the informations you require cannot be located please contact Prof A.J. Walton (Anthony.Walton@ee.ed.ac.uk). More information about the institute's activities is available below:

Overview

• IMNS Staff List (Technology, SMC) , Intercom directory
• IMNS Staff List (Design, Faraday Building)
• Scottish Microelectronics Centre
• History and the Current Activities of the IMNS (Technology)
• Some Potentially available 4th Year Projects
• Sample of Available Phd Projects
• Jobs and Studentships available in the IMNS
• TCAD and Statistical Software available in the IMNS and elsewhere
• Teaching Chip ICs designed specifically for teaching microelectronics

External Services

• Microelectronics Imaging and Analysis Centre (MIAC)
• Microelectronic Fabrication Facilities and Services
• MEMS Fabrication Capabilities
• External Courses on Microelectronic Fabrication and Devices (Postscript version)

Extra information on research activities at Edinburgh

• Microelectronic test structures
  • Projects
• Design for Manufacturability (DFM)
• Technology Computer Aided Design (TCAD)
• Lithography
• Miniature Displays
  • Projects
  • Display images are available
• Al and Cu Damascene Metallisation - ACME
• MEMS - Micro-Systems (MST), Sensors and Actuators
• Micro-Cavity Gettering
• Small Geometry Devices
• Selected papers and reports

Conference Information

• ICMTS - International Conference on Microelectronic Test Structures
• More conference information available on the web

Publications related to semiconductor technology

Research Funding Bodies

More information on the web related to semiconductor technology

How to get to the Department

• How to get to the SMC and Main Department buildings using public transport
  • Map of the Kings Building campus in relation to Central Edinburgh (Postscript version)
  • Map of the Edinburgh area indicating route from the airport (Postscript version)
  • The INMS (Technology) located in the the Scottish Microelectronics Centre - Electrical and Electronic Engineering West (Map)
  • Map of the Kings Building campus showing location of old cleanrooms in in Electrical and Electronic Engineering East complex (Postscript version)

Revision Date: 10 October 2002